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Proceedings Paper

Microtopographic inspection by optical triangulation
Author(s): Manuel F. M. Costa
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Paper Abstract

Methodology and instrumentation for automatic measurements of high accuracy optical flats is described. These include the homogeneity of material and shape of optical surfaces testing. The expert system applies alternatively: Fourier transform and spatial carrier phase-shifting method for interferers analysis and the new three step method for refractive index distribution testing. The error analysis and examples of measurements are presented.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B0 (23 July 1993); doi: 10.1117/12.2308815
Show Author Affiliations
Manuel F. M. Costa, Univ. de Minho (Portugal)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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