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Proceedings Paper

Point to point scanning magnetic disk surface profilometer
Author(s): Mang Cao
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Paper Abstract

A novel method of an optical heterodyne processing system is presented which allows us to take out small irregularities in optical thickness of an uncoated substrate for a compact disk. By use of this method the phase of light which passes through the substrate disk can be extracted with a high precision (±0.02 rad). The irregularities are measured over all the substrate disk and processed to give their statistical parameters, such as probability density function, variance, and auto-correlation function.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AX (23 July 1993); doi: 10.1117/12.2308812
Show Author Affiliations
Mang Cao, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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