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Proceedings Paper

Detection of errors in microlithographic grating fabrication
Author(s): M. Heissmeier
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Paper Abstract

The rotation method for the absolute testing of three flatsl is extendet by adding a second rotation of one of the flats2. This means that altogether five inter- ferograms of pairs of flats (positional combinations) are evaluated: three basic combinations and two rotational combinations. The effect of random measuring errors is minimized by fully applying least-squares methods. Here the addition of the second rotation leads to a substantial increase of accuracy of the results and enables the lateral resolution to be further enhanced. Measurements using a special phase-stepping Fizeau-interferometer were carried out. Flats of 200 mm diameter were tested. The lateral resolution is about 1/100 of the plate diameter.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AR (23 July 1993); doi: 10.1117/12.2308806
Show Author Affiliations
M. Heissmeier, Physikalisches Institut der Univ. Erlangen-Nurnberg (Germany)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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