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Proceedings Paper

Thresholds for surface imperfections
Author(s): L. R. Baker
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Paper Abstract

We report on the fabrication and measurement of refractive microlens arrays in photoresist. The production steps are shown in detail. A novel " base layer " technique is described which makes it possible to fabricate lower numerical apertures lenses in resist. The processing of melted microlens arrays starts with cylindrical islands of resist on a glass substrate. After the development in a wet chemical process the cylinders are melted on a hot plate. The surface tension forms the liquid into spherical shape which can be used as a microlens. The lens shape depends on the critical angle between the substrate and the resist at the circumference of the lens. The wave aberrations were measured in a Mach - Zehnder interferometer with phase shift capability. Based on the measurements point spread function and modulation transfer function are determined.

Paper Details

Date Published: 23 July 1993
PDF: 3 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AK (23 July 1993); doi: 10.1117/12.2308799
Show Author Affiliations
L. R. Baker, SIRA Consultant (United Kingdom)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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