Share Email Print
cover

Proceedings Paper

Phase-shifting techniques in an interferometer with an externally pumped phase-conjugate mirror
Author(s): Sabine Ludwig
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In practice, form deviations of technical surfaces lie within the micro- and submicrometer range. They often exhibit a micro structure of over 100 cycles/mm. Thus an interference microscope with an interference increment within the micrometer range is required for measuring the micro structure. An object field of 5 mm x 5 mm is usually necessary for a complete examination. Prism inferometry offers a favourable and practicable solution.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198385 (23 July 1993); doi: 10.1117/12.2308712
Show Author Affiliations
Sabine Ludwig, Friedrich-Schiller-Univ. (Germany)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

© SPIE. Terms of Use
Back to Top