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Proceedings Paper

Micro shape and rough surface analysis by fringe projection
Author(s): Klaus Leonhardt
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Paper Abstract

A new microscopic fringe projection system is described. Projection of the grating and imaging of the fringes is accomplished by the same objective. The spectrum of the binary grating is spatially filtered and projected into the aperture with a lateral shift. This leads to telecentric projection and imaging under oblique incidence. Topo- graphies of specularely as well as diffusely reflecting surfaces can be obtained. The measurement of rough, technical surfaces is demonstrated.

Paper Details

Date Published: 26 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19833H (26 July 1993); doi: 10.1117/12.2308544
Show Author Affiliations
Klaus Leonhardt, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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