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Proceedings Paper • Open Access

Moore's law, lithography, and how optics drive the semiconductor industry
Author(s): G. Dan Hutcheson

Paper Abstract

When the subject of Moore's Law arises, the important role that lithography plays and how advances in optics have made it all possible is seldom brought up in the world outside of lithography itself. When lithography is mentioned up in the value chain, it’s often a critique of how advances are coming too slow and getting far too expensive. Yet advances in lithography are at the core of how Moore’s Law is viable. This presentation lays out how technology and the economics of optics in manufacturing interleave to drive the immense value that semiconductors have brought to the world by making it smarter. Continuing these advances will be critical as electronics make the move from smart to cognitive.

Paper Details

Date Published: 19 March 2018
PDF: 14 pages
Proc. SPIE 10583, Extreme Ultraviolet (EUV) Lithography IX, 1058303 (19 March 2018); doi: 10.1117/12.2308299
Show Author Affiliations
G. Dan Hutcheson, VLSI Research Inc. (United States)


Published in SPIE Proceedings Vol. 10583:
Extreme Ultraviolet (EUV) Lithography IX
Kenneth A. Goldberg, Editor(s)

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