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Proceedings Paper • Open Access

Electrostatically operated optical microshutter array for a miniature integrated optical spectrometer
Author(s): Samir Ilias; Francis Picard; Carl Larouche; Roman Kruzelecky; Wes Jamroz

Paper Abstract

16x1 programmable microshutter arrays allowing control of the light transmitted through a transparent substrate supporting the array were successfully fabricated using surface micromachining technology. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient through the actuator thickness. When a sufficient voltage is applied between the microshutter and the actuation electrode surrounding the associated microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. The pull-in voltage to close the microslit was about 110 V and the response times to close and open the microslit were about 2 ms and 7 ms, respectively.

Paper Details

Date Published: 21 November 2017
PDF: 6 pages
Proc. SPIE 10566, International Conference on Space Optics — ICSO 2008, 1056605 (21 November 2017); doi: 10.1117/12.2308247
Show Author Affiliations
Samir Ilias, INO (Canada)
Francis Picard, INO (Canada)
Carl Larouche, INO (Canada)
Roman Kruzelecky, MPB Communications Inc. (Canada)
Wes Jamroz, MPB Communications Inc. (Canada)

Published in SPIE Proceedings Vol. 10566:
International Conference on Space Optics — ICSO 2008
Josiane Costeraste; Errico Armandillo; Nikos Karafolas, Editor(s)

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