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Proceedings Paper • Open Access

MEMS tunable grating micro-spectrometer
Author(s): Maurizio Tormen; R. Lockhart; P. Niedermann; T. Overstolz; A. Hoogerwerf; J.-M. Mayor; J. Pierer; C. Bosshard; R. Ischer; G. Voirin; R. P. Stanley

Paper Abstract

The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings.

This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

Paper Details

Date Published: 21 November 2017
PDF: 5 pages
Proc. SPIE 10566, International Conference on Space Optics — ICSO 2008, 1056607 (21 November 2017); doi: 10.1117/12.2308198
Show Author Affiliations
Maurizio Tormen, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
R. Lockhart, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
P. Niedermann, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
T. Overstolz, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
A. Hoogerwerf, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
J.-M. Mayor, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
J. Pierer, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
C. Bosshard, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
R. Ischer, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
G. Voirin, Swiss Ctr. for Electronics and Microtechnology (Switzerland)
R. P. Stanley, Swiss Ctr. for Electronics and Microtechnology (Switzerland)


Published in SPIE Proceedings Vol. 10566:
International Conference on Space Optics — ICSO 2008
Josiane Costeraste; Errico Armandillo; Nikos Karafolas, Editor(s)

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