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Proceedings Paper • Open Access

Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry
Author(s): Arnaud Liotard; Frédéric Zamkotsian

Paper Abstract

The micro-opto-electro-mechanical systems (MOEMS), based on mature technologies of micro-electronics, are essential in the design of future astronomical instruments. One of these key-components is the microdeformable mirror for wave-front correction. Very challenging topics like search of exo-planets could greatly benefit from this technology. Design, realization and characterization of micro-Deformable Mirrors are under way at Laboratoire d’Astrophysique de Marseille (LAM) in collaboration with Laboratoire d’Analyse et d’Architecture des Systèmes (LAAS).

In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170*100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370±10nm for 150V applied and its resonant frequency is 1170±50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31±3 kHz.

Paper Details

Date Published: 21 November 2017
PDF: 9 pages
Proc. SPIE 10568, International Conference on Space Optics — ICSO 2004, 105681Q (21 November 2017); doi: 10.1117/12.2307988
Show Author Affiliations
Arnaud Liotard, Lab. d’Astrophysique de Marseille (France)
Frédéric Zamkotsian, Lab. d’Astrophysique de Marseille (France)

Published in SPIE Proceedings Vol. 10568:
International Conference on Space Optics — ICSO 2004
Josiane Costeraste; Errico Armandillo, Editor(s)

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