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Proceedings Paper

MEMS and micro sensor
Author(s): Yan Hong; Yanbin Cai
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Paper Abstract

This paper briefly introduces the concept of mems (micro-electro-mechanical system), analyzes the importance and some application in the aerospace field. Finally, this paper also discussed the mems in space application recommendations.

Paper Details

Date Published: 20 February 2018
PDF: 5 pages
Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 1069759 (20 February 2018); doi: 10.1117/12.2307141
Show Author Affiliations
Yan Hong, Beijing Aerospace Automatic Control Institute (China)
Yanbin Cai, Beijing Aerospace Control Institute (China)


Published in SPIE Proceedings Vol. 10697:
Fourth Seminar on Novel Optoelectronic Detection Technology and Application
Weiqi Jin; Ye Li, Editor(s)

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