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Polarization effects in 3D femtosecond direct laser writing nanolithography
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Paper Abstract

In this work we reveal an influence of polarization of the laser beam on polymerization in direct laser writing. It was experimentally found that the width of suspended lines fabricated in SZ2080, OrmoComp and PETA (pentaerythritol triacrylate) pre-polymers directly depends on the incident polarization and is largest when the angle between the electric field vector and the sample translation direction is α = 90° and the smallest when α = 0°. The size of polymerized structures is consistent with theoretical simulations based on vectorial Debye theory. Experiments were performed by using average laser power corresponding to the middle value of the fabrication window. Polarization was found to be affecting feature sizes while structuring various widespread photoresists, the observed variation was material dependent and measured from 5 to 22% in the line-width. The performed study proves that polarization can be used as a variable parameter for fine tuning of the voxel's aspect ratio.

Paper Details

Date Published: 22 May 2018
PDF: 6 pages
Proc. SPIE 10675, 3D Printed Optics and Additive Photonic Manufacturing, 106750V (22 May 2018); doi: 10.1117/12.2306904
Show Author Affiliations
Simonas Varapnickas, Vilnius Univ. (Lithuania)
Sima Rekštytė, Vilnius Univ. (Lithuania)
Darius Gailevičius, Vilnius Univ. (Lithuania)
Etienne Brasselet, Lab. Ondes et Matière d'Aquitaine, CNRS, Univ. de Bordeaux (France)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)


Published in SPIE Proceedings Vol. 10675:
3D Printed Optics and Additive Photonic Manufacturing
Alois M. Herkommer; Georg von Freymann; Manuel Flury, Editor(s)

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