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Proceedings Paper

Improved calibration of vertical scanning optical profilometers for spherical profiles measurements
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Paper Abstract

A new method for calibrating optical scanning profilometers is presented. Especially adapted to spherical and aspherical profile measurements, it shows an increase of accuracy bigger than one order of magnitude for radius of curvature measurements. Calibration of vertical scaling is obtained with a reduction of its uncertainty by a factor larger than 2, which also demonstrates the advantage of this method for any surface measurements. Using commercially available reference balls, this method is easily implementable.

Paper Details

Date Published: 15 June 2018
PDF: 6 pages
Proc. SPIE 10692, Optical Fabrication, Testing, and Metrology VI, 1069207 (15 June 2018); doi: 10.1117/12.2306797
Show Author Affiliations
Jeremy Béguelin, SUSS MicroOptics SA (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Wilfried Noell, SUSS MicroOptics SA (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)


Published in SPIE Proceedings Vol. 10692:
Optical Fabrication, Testing, and Metrology VI
Sven Schröder; Roland Geyl, Editor(s)

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