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An imprinted polymer-based guided mode resonance grating sensor
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Paper Abstract

In this paper, different guided mode resonance (GMR) grating sensors are studied with the focus on investigating the possibility of high-performance configurations with simplified and potentially low-cost fabrication methods. The gratings are fabricated in polymer using nano-imprint lithography (NIL). We have chosen Ormocer materials, as they allow fabrication at room temperature, are UV patternable and have good optical and dielectric properties. The GMR gratings have a pitch around 550 nm, which corresponds to a resonance response around 850 nm with a Q factor of 2200 in simulations. In experiment, gratings imprinted on glass and on foil are characterized, showing a successful imprinting process of both devices. The measured optical response of the GMR grating for a change of the refractive index unit (RIU) of the cover (Δλ=Δnc) is 100 nm/RIU. The measured temperature sensitivity is -0.07 nm/K.

Paper Details

Date Published: 9 May 2018
PDF: 10 pages
Proc. SPIE 10680, Optical Sensing and Detection V, 1068014 (9 May 2018); doi: 10.1117/12.2306396
Show Author Affiliations
M.-A. Mattelin, Ctr. for Microsystems Technology (Belgium)
imec (Belgium)
Ghent Univ. (Belgium)
G. Van Steenberge, Ctr. for Microsystems Technology (Belgium)
imec (Belgium)
Ghent Univ. (Belgium)
J. Missinne, Ctr. for Microsystems Technology (Belgium)
imec (Belgium)
Ghent Univ. (Belgium)


Published in SPIE Proceedings Vol. 10680:
Optical Sensing and Detection V
Francis Berghmans; Anna G. Mignani, Editor(s)

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