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Real-time gas analysis using mid-infrared microcavities
Author(s): Tiening Jin; Junchao Zhou; Pao Tai Lin
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Paper Abstract

In-situ gas analysis was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures were made of ultrathin silicate membranes using the complementary metal-oxide-semiconductor (CMOS) process. Fourier transform infrared spectroscopy (FTIR) shows that the silicate membrane is transparent in the range 2.5 - 6.0 μm, overlapping with gas absorption lines and therefore enables gas detection applications. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands corresponding to functional group stretching: C-H, C-O, and O-N, respectively. A short response time of subsecond and high accuracy of gas identification were achieved. The chip-scale mid-IR sensor is a new platform for an in-situ, remote, and embedded gas monitoring system.

Paper Details

Date Published: 16 May 2018
PDF: 4 pages
Proc. SPIE 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX, 1062911 (16 May 2018); doi: 10.1117/12.2305429
Show Author Affiliations
Tiening Jin, Texas A&M Univ. (United States)
Junchao Zhou, Texas A&M Univ. (United States)
Pao Tai Lin, Texas A&M Univ. (United States)


Published in SPIE Proceedings Vol. 10629:
Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX
Jason A. Guicheteau; Augustus Way Fountain; Chris R. Howle, Editor(s)

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