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Proceedings Paper

High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Author(s): Dirk Weiler; Frank Hochschulz; Claudia Busch; Matthias Stein; Marvin D. Michel; Daniel Würfel; Renee Lerch; Martin Petermann; Thomas Geruschke; Sebastian Blaeser; Sascha Weyers; Holger Vogt
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Paper Abstract

This paper presents the results of a high-performance digital QVGA-IRFPA based on uncooled microbolometers with a pixel-pitch of 17 μm and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Due to a direct conversion of the microbolometer’s resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK is achieved. Due to a broad-band antireflection coating the digital 17 μm QVGA-IRFPA achieves a high sensitivity in the LWIR (wavelength 8 μm to 14 μm) and MWIR (wavelength 3 μm to 5 μm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.

Paper Details

Date Published: 29 May 2018
PDF: 6 pages
Proc. SPIE 10624, Infrared Technology and Applications XLIV, 1062419 (29 May 2018); doi: 10.1117/12.2304866
Show Author Affiliations
Dirk Weiler, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Frank Hochschulz, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Claudia Busch, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Matthias Stein, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Marvin D. Michel, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Daniel Würfel, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Renee Lerch, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Martin Petermann, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Thomas Geruschke, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Sebastian Blaeser, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Sascha Weyers, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Holger Vogt, Univ. of Duisburg-Essen (Germany)


Published in SPIE Proceedings Vol. 10624:
Infrared Technology and Applications XLIV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; John Lester Miller; Paul R. Norton, Editor(s)

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