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0.16-µm BCD single-photon avalanche diode with 30-ps timing jitter, high detection efficiency, and low noise
Author(s): Mirko Sanzaro; Paolo Gattari; Federica Villa; Alberto Tosi; Giuseppe Croce; Franco Zappa
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Paper Abstract

CMOS SPADs are nowadays an established imaging technology for applications requiring single-photon sensitivity in a compact form-factor (e.g. three-dimensional LIDAR imaging and fluorescence lifetime FLIM microscopy). However, we aimed at further enhance overall SPAD performances, by exploiting smart power technologies, such as the BCD (Bipolar-CMOS-DMOS) one. We achieved the present state-of-the-art SPADs fabricated in the 0.16 μm BCD technology by STMicroelectronics, attaining >60% photon detection efficiency at 500 nm, dark count rate density < 0.2 cps/μm2, and less than 30 ps FWHM timing jitter.

Paper Details

Date Published: 14 May 2018
PDF: 7 pages
Proc. SPIE 10659, Advanced Photon Counting Techniques XII, 106590D (14 May 2018); doi: 10.1117/12.2304851
Show Author Affiliations
Mirko Sanzaro, Politecnico di Milano (Italy)
Paolo Gattari, STMicroelectronics SRL (Italy)
Federica Villa, Politecnico di Milano (Italy)
Alberto Tosi, Politecnico di Milano (Italy)
Giuseppe Croce, STMicroelectronics SRL (Italy)
Franco Zappa, Politecnico di Milano (Italy)


Published in SPIE Proceedings Vol. 10659:
Advanced Photon Counting Techniques XII
Mark A. Itzler; Joe C. Campbell, Editor(s)

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