Share Email Print
cover

Proceedings Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors
Author(s): A. L. Cui; Z. H. Ye; C. H. Sun; L. F. Liu; X. N. Hu; R. J. Ding; L. He
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

As a narrow bandgap semiconductor, the preparation of surface passivation layers on HgCdTe film epilayers is essential in the process of device fabrication. Most new infrared detectors use the mesa structure. A stable and reproducible passivation technology which meets the surface uniform cover of the high aspect ratio mesa is particularly important. Atomic layer deposition (ALD) is a new type of accurate surface thin film preparation technique, which has several characteristics such as depositing large-area uniform films, making the film thickness control at nanometer level feasible, and lower deposition temperature. ALD-ZnS film is prepared on the HgCdTe IRFPAs chip at 65°. I-V and R-V curves are similar to that of IRFPAs with CdTe thermal passivation. This shows that ALD ZnS film has a good potential application in the passivation of high aspect ratio mesa-array HgCdTe devices.

Paper Details

Date Published: 18 June 2018
PDF: 7 pages
Proc. SPIE 10624, Infrared Technology and Applications XLIV, 106241Z (18 June 2018); doi: 10.1117/12.2304578
Show Author Affiliations
A. L. Cui, Shanghai Institute of Technical Physics (China)
Univ. of Chinese Academy of Sciences (China)
Z. H. Ye, Shanghai Institute of Technical Physics (China)
C. H. Sun, Shanghai Institute of Technical Physics (China)
L. F. Liu, Shanghai Institute of Technical Physics (China)
Univ. of Chinese Academy of Sciences (China)
X. N. Hu, Shanghai Institute of Technical Physics (China)
R. J. Ding, Shanghai Institute of Technical Physics (China)
L. He, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 10624:
Infrared Technology and Applications XLIV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; John Lester Miller; Paul R. Norton, Editor(s)

© SPIE. Terms of Use
Back to Top