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Proceedings Paper • Open Access

A platform for European CMOS image sensors for space applications
Author(s): K. Minoglou; D. San Segundo Bello; D. Sabuncuoglu Tezcan; L. Haspeslagh; J. Van Olmen; B. Merry; C. Cavaco; F. Mazzamuto; I. Toqué-Trésonne; R. Moirin; M. Brouwer; M. Toccafondi; G. Preti; M. Rosmeulen; P. De Moor

Paper Abstract

Both ESA and the EC have identified the need for a supply chain of CMOS imagers for space applications which uses solely European sources. An essential requirement on this supply chain is the platformization of the process modules, in particular when it comes to very specific processing steps, such as those required for the manufacturing of backside illuminated image sensors. This is the goal of the European (EC/FP7/SPACE) funded project EUROCIS. All EUROCIS partners have excellent know-how and track record in the expertise fields required. Imec has been leading the imager chip design and the front side and backside processing. LASSE, as a major player in the laser annealing supplier sector, has been focusing on the optimization of the process related to the backside passivation of the image sensors. TNO, known worldwide as a top developer of instruments for scientific research, including space research and sensors for satellites, has contributed in the domain of optical layers for space instruments and optimized antireflective coatings. Finally, Selex ES, as a world-wide leader for manufacturing instruments with expertise in various space missions and programs, has defined the image sensor specifications and is taking care of the final device characterization. In this paper, an overview of the process flow, the results on test structures and imagers processed using this platform will be presented.

Paper Details

Date Published: 17 November 2017
PDF: 9 pages
Proc. SPIE 10563, International Conference on Space Optics — ICSO 2014, 1056304 (17 November 2017); doi: 10.1117/12.2304233
Show Author Affiliations
K. Minoglou, IMEC (Belgium)
D. San Segundo Bello, IMEC (Belgium)
D. Sabuncuoglu Tezcan, IMEC (Belgium)
L. Haspeslagh, IMEC (Belgium)
J. Van Olmen, IMEC (Belgium)
B. Merry, IMEC (Belgium)
C. Cavaco, IMEC (Belgium)
F. Mazzamuto, LASSE (France)
I. Toqué-Trésonne, LASSE (France)
R. Moirin, LASSE (France)
M. Brouwer, TNO (Netherlands)
M. Toccafondi, Selex ES (Italy)
G. Preti, Selex ES (Italy)
M. Rosmeulen, IMEC (Belgium)
P. De Moor, IMEC (Belgium)

Published in SPIE Proceedings Vol. 10563:
International Conference on Space Optics — ICSO 2014
Zoran Sodnik; Bruno Cugny; Nikos Karafolas, Editor(s)

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