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Proceedings Paper • Open Access

Light scattering techniques for the characterization of optical components
Author(s): M. Hauptvogel; S. Schröder; T. Herffurth; M. Trost; A. von Finck; A. Duparré; T. Weigel

Paper Abstract

The rapid developments in optical technologies generate increasingly higher and sometimes completely new demands on the quality of materials, surfaces, components, and systems. Examples for such driving applications are the steadily shrinking feature sizes in semiconductor lithography, nanostructured functional surfaces for consumer optics, and advanced optical systems for astronomy and space applications. The reduction of surface defects as well as the minimization of roughness and other scatter-relevant irregularities are essential factors in all these areas of application. Quality-monitoring for analysing and improving those properties must ensure that even minimal defects and roughness values can be detected reliably. Light scattering methods have a high potential for a non-contact, rapid, efficient, and sensitive determination of roughness, surface structures, and defects.

Paper Details

Date Published: 17 November 2017
PDF: 8 pages
Proc. SPIE 10563, International Conference on Space Optics — ICSO 2014, 1056347 (17 November 2017); doi: 10.1117/12.2304146
Show Author Affiliations
M. Hauptvogel, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
S. Schröder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
T. Herffurth, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
M. Trost, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
A. von Finck, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
A. Duparré, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
T. Weigel, RUAG Space AG (Switzerland)


Published in SPIE Proceedings Vol. 10563:
International Conference on Space Optics — ICSO 2014
Zoran Sodnik; Bruno Cugny; Nikos Karafolas, Editor(s)

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