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Proceedings Paper

3D microscope using diffraction grating
Author(s): Thomas DeWitt; Douglas A. Lyon
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Paper Abstract

An optical microscope has been adapted for 3-D inspection of small capillaries in thread spinnerets by placing a diffraction grating between the microscope objective and the specimen. We show how a grating was specified using a quantitative analysis of groove spacing and geometry. An illumination system was specified based on incident angle and light wavelength. Specimens are placed on a robotic stage for positioning, and repositioning affords multiple perspective views of the target depending upon the diffraction order visible to the objective.

Paper Details

Date Published: 19 January 1996
PDF: 12 pages
Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); doi: 10.1117/12.230381
Show Author Affiliations
Thomas DeWitt, DeWitt Brothers Tool Co., Inc. (United States)
Douglas A. Lyon, Univ. of Bridgeport (United States)

Published in SPIE Proceedings Vol. 2599:
Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology
Michael R. Descour; Kevin G. Harding; Donald J. Svetkoff, Editor(s)

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