Share Email Print
cover

Proceedings Paper

Inspection machine using laser scanning for chip-mounted circuit boards
Author(s): Koichi Kawata; Nobuhiro Araki; Hiroto Toba; Takumi Seto; Kazutoshi Ikegaya; Yukifumi Tsuda; Kunio Sannomiya
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper deals with the in-line three-dimensional measurement of circuit boards with mounted electronic components. The surface for inspection is scanned by a laser beam, and three-dimensional data are obtained by triangulation from the position of the reflected light measured with a position-sensitive detector (PSD). The location of reflected light is measured from a direction at an angle to the axis of the incident laser beam. The light from the target is reflected by the mirror which is positioned between the f (theta) lens and the target to increase the angle and the measuring sensitivity. The position of the image plane of the reflected beam varies according to the scanning position, which produces a similar effect to the variation of height. The measured value is corrected by a ROM set for three-dimensional space in data processing. The error in height measurement is 0.06 to 0.08 mm, and 0.025 mm accuracy is obtained in the neighboring area of the electronic component targets in practical inspection.

Paper Details

Date Published: 19 January 1996
PDF: 7 pages
Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); doi: 10.1117/12.230374
Show Author Affiliations
Koichi Kawata, Matsushita Research Institute Tokyo, Inc. (Japan)
Nobuhiro Araki, Matsushita Research Institute Tokyo, Inc. (Japan)
Hiroto Toba, Matsushita Communication Industrial Co. Ltd. (Japan)
Takumi Seto, Matsushita Communication Industrial Co. Ltd. (Japan)
Kazutoshi Ikegaya, Matsushita Research Institute Tokyo, Inc. (Japan)
Yukifumi Tsuda, Matsushita Research Institute Tokyo, Inc. (Japan)
Kunio Sannomiya, Matsushita Research Institute Tokyo, Inc. (Japan)


Published in SPIE Proceedings Vol. 2599:
Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology
Michael R. Descour; Kevin G. Harding; Donald J. Svetkoff, Editor(s)

© SPIE. Terms of Use
Back to Top