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Proceedings Paper

Growth of bio sensor materials by physical vapor transport method
Author(s): N. B. Singh; Ching Hua Su; Bradley Arnold; Brian Cullum; Fow-Sen Choa; Tara Carpenter; David Sachs; K. D. Mandal
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Paper Abstract

Recently there is a big thrust on bio-inspired sensors and there has been a large rise in the investment and expectations for nanotechnology to meet these goals. For in situ sensor development materials deposition on substrate is essential part of device development. Physical vapor deposition (PVD), chemical vapor deposition (CVD) and molecular organic vapor deposition methods have developed for growth of semiconductor bulk and thin film growth with some modifications have been used for these materials. Oxides and other elements of VI group such as sulfides and selenides are key components in skins of many species. Growth of ordered structures containing these elements have been achieved by using PVD method. This paper describes effect of growth parameters during PVD growth on the quality of materials. Growth kinetics and mechanism will be discussed for the vertical and horizontal growth reactors. Since most of the efficient materials systems are multinary and in many cases noncongruent, PVD provides pathway to grow materials below melting temperature.

Paper Details

Date Published: 14 May 2018
PDF: 5 pages
Proc. SPIE 10662, Smart Biomedical and Physiological Sensor Technology XV, 1066203 (14 May 2018); doi: 10.1117/12.2303665
Show Author Affiliations
N. B. Singh, Univ. of Maryland, Baltimore County (United States)
Ching Hua Su, NASA Marshall Space Flight Ctr. (United States)
Bradley Arnold, Univ. of Maryland, Baltimore County (United States)
Brian Cullum, Univ. of Maryland, Baltimore County (United States)
Fow-Sen Choa, Univ. of Maryland, Baltimore County (United States)
Tara Carpenter, Univ. of Maryland, Baltimore County (United States)
David Sachs, Univ. of Maryland, Baltimore County (United States)
K. D. Mandal, Indian Institute of Technology, Banaras Hindu Univ. (India)


Published in SPIE Proceedings Vol. 10662:
Smart Biomedical and Physiological Sensor Technology XV
Brian M. Cullum; Douglas Kiehl; Eric S. McLamore, Editor(s)

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