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Proceedings Paper

Single layer microbolometer detector pixel using ZnO material
Author(s): M. Yusuf Tanrikulu; Ciğdem Yildizak; Ali K. Okyay; Orhan Akar; Adem Sarac; Tayfun Akin
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Paper Abstract

This paper presents the development of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD coated ZnO material, it can be used both as structural and active layers in microbolometer detectors. The design, simulations, and the fabrication optimization of 35 μm single layer ZnO microbolometers are shown in this study. The designed pixel has a thermal conductance of 3.4x10-7 W/K and a thermal time constant of 1.34 ms while it has a maximum displacement of 0.43 μm under 1000g acceleration. This structure can be used to decrease the design complexities and fabrication costs and increase the yield of the detectors making them possible to be used in low-cost applications.

Paper Details

Date Published: 29 May 2018
PDF: 8 pages
Proc. SPIE 10624, Infrared Technology and Applications XLIV, 1062417 (29 May 2018); doi: 10.1117/12.2302996
Show Author Affiliations
M. Yusuf Tanrikulu, Adana Science and Technology Univ. (Turkey)
Ciğdem Yildizak, Adana Science and Technology Univ. (Turkey)
Ali K. Okyay, Okyay Technologies (Turkey)
Orhan Akar, Middle East Technical Univ. (Turkey)
Adem Sarac, Middle East Technical Univ. (Turkey)
Tayfun Akin, Middle East Technical Univ. (Turkey)


Published in SPIE Proceedings Vol. 10624:
Infrared Technology and Applications XLIV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; John Lester Miller; Paul R. Norton, Editor(s)

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