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Proceedings Paper

Submicron thin-film mom-diodes for the detection of 10 pm infrared laser radiation
Author(s): I. Wilke
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Paper Abstract

We manufacture thin-film Ni-NiO-Ni diodes for detection of 10 μm C02-laser radiation with the aid of electron and UV lithography as well as sputtering techniques. Minimum strip width is ≤ 0.35 μm, NiO thickness 50 Å and measured coupling factor ≥ 130.

Paper Details

Date Published: 1 December 1990
PDF: 3 pages
Proc. SPIE 1514, 15th International Conference on Infrared and Millimeter Waves, 15143E (1 December 1990); doi: 10.1117/12.2301532
Show Author Affiliations
I. Wilke, ETH Zurich (Switzerland)


Published in SPIE Proceedings Vol. 1514:
15th International Conference on Infrared and Millimeter Waves
Richard J. Temkin, Editor(s)

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