Share Email Print
cover

Proceedings Paper

Integrated optical ring resonator on silicon with thermal tuning and in-situ temperature measurement
Author(s): Paeivi Heimala; Pekka Katila; Jaakko Aarnio
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/ degree(s)C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/ degree(s)C.

Paper Details

Date Published: 10 January 1996
PDF: 7 pages
Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); doi: 10.1117/12.229974
Show Author Affiliations
Paeivi Heimala, VTT Electronics (Finland)
Pekka Katila, VTT Electronics (Finland)
Jaakko Aarnio, Nokia Research Ctr. (Finland)


Published in SPIE Proceedings Vol. 2695:
Functional Photonic and Fiber Devices
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

© SPIE. Terms of Use
Back to Top