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Proceedings Paper

Integrated optical ring resonator on silicon with thermal tuning and in-situ temperature measurement
Author(s): Paeivi Heimala; Pekka Katila; Jaakko Aarnio
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Paper Abstract

Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/ degree(s)C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/ degree(s)C.

Paper Details

Date Published: 10 January 1996
PDF: 7 pages
Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); doi: 10.1117/12.229974
Show Author Affiliations
Paeivi Heimala, VTT Electronics (Finland)
Pekka Katila, VTT Electronics (Finland)
Jaakko Aarnio, Nokia Research Ctr. (Finland)

Published in SPIE Proceedings Vol. 2695:
Functional Photonic and Fiber Devices
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

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