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Proceedings Paper

Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon
Author(s): S. Iraj Najafi; C.-Y. Li; J. E. Chisham; Mark P. Andrews; Paul Coudray; Alireza Malek-Tabrizi; Nasser Peyghambarian
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Paper Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

Paper Details

Date Published: 10 January 1996
PDF: 4 pages
Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); doi: 10.1117/12.229957
Show Author Affiliations
S. Iraj Najafi, Ecole Polytechnique de Montreal (Canada)
C.-Y. Li, Ecole Polytechnique de Montreal and McGill Univ (Canada) and Optical Sciences Ctr./Univ of Arizona (United States)
J. E. Chisham, McGill Univ. (Canada)
Mark P. Andrews, McGill Univ. (Canada)
Paul Coudray, Ecole Polytechnique de Montreal and McGill Univ. (Canada)
Alireza Malek-Tabrizi, Ecole Polytechnique de Montreal (Canada)
Nasser Peyghambarian, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 2695:
Functional Photonic and Fiber Devices
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

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