Share Email Print

Proceedings Paper • new

DUV light source sustainability achievements and next steps
Author(s): Yzzer Roman; Ted Cacouris; Kumar Raja Guvindan Raju; Dinesh Kanawade; Walt Gillespie; Siqi Luo; Eric Mason; David Manley; Saptaparna Das
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Key sustainability opportunities have been executed in support of corporate initiatives to reduce the environmental footprint and decrease the running cost of DUV light sources. Previously, substantial neon savings were demonstrated over several years through optimized gas management technologies. Beyond this work, Cymer is developing the XLGR 100, a self-contained neon recycling system, to enable minimal gas consumption. The high efficiency results of the XLGR 100 in a production factory are validated in this paper.

Cymer has also developed new light source modules with 33% longer life in an effort to reduce raw and associated resource consumption. In addition, a progress report is included regarding the improvements developed to reduce light source energy consumption.

Paper Details

Date Published: 21 March 2018
PDF: 7 pages
Proc. SPIE 10587, Optical Microlithography XXXI, 1058716 (21 March 2018); doi: 10.1117/12.2299387
Show Author Affiliations
Yzzer Roman, Cymer LLC (United States)
Ted Cacouris, Cymer LLC (United States)
Kumar Raja Guvindan Raju, Cymer LLC (United States)
Dinesh Kanawade, Cymer LLC (United States)
Walt Gillespie, Cymer LLC (United States)
Siqi Luo, Cymer LLC (United States)
Eric Mason, Cymer LLC (United States)
David Manley, Cymer LLC (United States)
Saptaparna Das, Cymer LLC (United States)

Published in SPIE Proceedings Vol. 10587:
Optical Microlithography XXXI
Jongwook Kye, Editor(s)

© SPIE. Terms of Use
Back to Top