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Spatial and spectral filtering on focal plane arrays
Author(s): Yoram Karni; Michal Nitzani; Eli Jacobsohn; Ilana Grimberg; Sivan Gliksman; Avihoo Giladi; Leonid Krasovitski; Eran Avnon; Itay Hirsh; Leonid Bikov; Inna Lukomsky; Lior Shkedy; Rami Fraenkel; Itay Shtrichman; Pilar Gonzalez; Andy Lambrechts
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Paper Abstract

This article describes new imaging capabilities and technologies developed for infrared focal plane arrays (FPAs) at SCD. One of the new technologies is the patterning of the back surface of the FPA, whose front surface is bonded to a silicon readout integrated circuit (ROIC). Another is the hybridization of a spectral filter to the same back surface.

Increased image resolution has been achieved by using an opaque mask on the backside of the FPA with small central apertures. The reduced fill factor of the sensor leads to lower crosstalk between neighboring pixels and a higher Nyquist frequency. A highly detailed multi-mega pixel image is obtained when the sensor is micro-scanned relative to the imaging optics.

Spectral filtering was achieved by hybridization of a designated filter to the backside of the FPA. The filter was glued to the FPA with high accuracy achieving single pixel resolution. System implementation of these SWIR sensor cameras has been demonstrated at imec and is reported in this paper.

First results are reported for a continuously varying monolithic filter deposited onto the FPA, which has a high spectral dispersion. We report electro-optical measurements on several different sensors and describe some of their key parameters.

Paper Details

Date Published: 23 May 2018
PDF: 10 pages
Proc. SPIE 10624, Infrared Technology and Applications XLIV, 106241H (23 May 2018); doi: 10.1117/12.2299302
Show Author Affiliations
Yoram Karni, SCD SemiConductor Devices (Israel)
Michal Nitzani, SCD SemiConductor Devices (Israel)
Eli Jacobsohn, SCD SemiConductor Devices (Israel)
Ilana Grimberg, SCD SemiConductor Devices (Israel)
Sivan Gliksman, SCD SemiConductor Devices (Israel)
Avihoo Giladi, SCD SemiConductor Devices (Israel)
Leonid Krasovitski, SCD SemiConductor Devices (Israel)
Eran Avnon, SCD SemiConductor Devices (Israel)
Itay Hirsh, SCD SemiConductor Devices (Israel)
Leonid Bikov, SCD SemiConductor Devices (Israel)
Inna Lukomsky, SCD SemiConductor Devices (Israel)
Lior Shkedy, SCD SemiConductor Devices (Israel)
Rami Fraenkel, SCD SemiConductor Devices (Israel)
Itay Shtrichman, SCD SemiConductor Devices (Israel)
Pilar Gonzalez, IMEC (Belgium)
Andy Lambrechts, IMEC (Belgium)

Published in SPIE Proceedings Vol. 10624:
Infrared Technology and Applications XLIV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; John Lester Miller; Paul R. Norton, Editor(s)

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