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Proceedings Paper

Defect enhancement of periodic structure using dye-doped liquid-crystal cells
Author(s): Jun-ichi Kato
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Paper Abstract

A nonlinear spatial filtering based on light-induced birefringence change in dye-doped liquid crystals has been applied to defect inspection of periodic structure. Photoisomer- ization of azo-dye molecules leads to local reorientation of the liquid-crystal molecules, by which polarization of the transmitted light is modulated depending on the incident light intensity. By selecting suitable polarization of the transmitted light, a self-aligned spatial filtering is realized. The filtering performances have been experimentally investigated.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27787I (1 September 1996); doi: 10.1117/12.2299153
Show Author Affiliations
Jun-ichi Kato, RIKEN (Japan)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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