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Proceedings Paper

A new method of high accuracy dynamic positioning using diode lasers
Author(s): Jinsong Han
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Paper Abstract

With liner frequency modulation property of a diode laser and the technique of dual-wavelength fine division, the zero OPD point of an interferometer is dynamically searched with a very high accuracy of 0.015 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27786U (1 September 1996); doi: 10.1117/12.2299129
Show Author Affiliations
Jinsong Han, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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