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Proceedings Paper

Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer
Author(s): Chu-Shik Kang
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Paper Abstract

We developed a system which can calibrate the vertical magnification of surface roughness testers in the range of Itc, 0.1 ti 10 µm with high accuracy. The system consists of an electromechanical transducer(EMT) and a heterodyne laser interferometer. With voltage applied, EMT simulates a sinusoidal surface and heterodyne laser interferometer is used to measure the amplitude of the simulated surface. By calculating the theoretical roughness value for this surface, and dividing it by the measured roughness value, we can obtain the calibiation constant. With this calibration system, the relative uncertainty of calibration is 2%.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27785G (1 September 1996); doi: 10.1117/12.2299079
Show Author Affiliations
Chu-Shik Kang, Korea Research Institute of Standards and Science (Korea, Republic of)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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