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Proceedings Paper

High resolution 3D laser interferometer with reduced linearity error
Author(s): Bernhard Hils
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Paper Abstract

We describe an interferometer-system for simultaneously displacement and tilt measurement that satisfies present need of high accuracy and high resolution in the sub-nm and sub aresecond range. This accuracy mainly requires the determination and correction of three major error sources in optical interferometry: Abbe offset error, changes of the refractive index of air and cyclic errors in phase detection.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277848 (1 September 1996); doi: 10.1117/12.2299034
Show Author Affiliations
Bernhard Hils, Physikalisches Institut der Univ. Frankfurt (Germany)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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