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Proceedings Paper

Profilometry of a plane reflecting surface using a confocal scanning optical microscope
Author(s): D. M. Gale
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Paper Abstract

Numerical studies of the performance of a one-dimensional Confocal Scanning Optical Microscope (CSOM) used as a profiler of highly reflecting surfaces have shown that the microscope suffers a degradation in performance for surfaces with high slope or discontinuities. These studies have serious implications for the use of the CSOM as a non-contact surface profiler. We will present an experimental study of the response of a CSOM to simple plane reflecting surfaces with varying degrees of tilt, with emphasis on the depth discrimination property and the ability of the instrument to accurately profile such objects.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783L (1 September 1996); doi: 10.1117/12.2299011
Show Author Affiliations
D. M. Gale, INAOE (Mexico)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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