Share Email Print
cover

Proceedings Paper

An intelligent system for the measurement of surface microstructure
Author(s): Zhihua Ding
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have developed an intelligent surface profilometry, with vertical resolution of 0.3nm, lateral resolution of 0.93 μm and testing accuracy of 0.5nm. This system can provide not only 2-D and 3-D topographies of testing surface, but also different evaluation parameters of surface roughness. In our system a feedback-control is implemented for phase shifting, and therefore problems encountered in the piezoelectric transducer are overcome. Comments on interferometer design and experimental examples are given in our paper.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782G (1 September 1996); doi: 10.1117/12.2298970
Show Author Affiliations
Zhihua Ding, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

© SPIE. Terms of Use
Back to Top