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Proceedings Paper

Simultaneous inspection of surface roughness and flatness by computer-generated hologram
Author(s): Eric W. Rogala
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Paper Abstract

A sensor array for surface curvature and roughness inspection is investigated. The sensor is based on the use of a computer-generated hologram as an analyser of surface curvature and roughness. The sensor can be exploited to estimate the optical surface roughness of irregularly curved surfaces. A contrast parameter to characterize the optical surface roughness is introduced.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782D (1 September 1996); doi: 10.1117/12.2298967
Show Author Affiliations
Eric W. Rogala, Optical Sciences Ctr., Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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