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Proceedings Paper

Pulsed laser deposition in a chemically reactive environment: application to the synthesis and deposition of high quality thin films
Author(s): I. N. Mihailescu
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Paper Abstract

From more than a decade now, the lasers have been applied to the synthesis and/ or the deposition of performnat thin films. The thin films are usually grown by laser chemical vapour deposition (LCVD). This method, however, suffers from the necessity of high-temperature substrate heating and usually resorts to dangerous gaseous precursors.

Paper Details

Date Published: 1 September 1996
PDF: 4 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781W (1 September 1996); doi: 10.1117/12.2298950
Show Author Affiliations
I. N. Mihailescu, Institute of Atomic Physics (Romania)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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