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Proceedings Paper

Gaussian pupil for superresolution at soft x-ray wavelength
Author(s): Young Ran Song
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Paper Abstract

By using Gaussian pupil, the resolution limit eG can be made less than Rayligh's limit of resolution ER. The Gaussian form of the amplitude impulse Uo(x) is initially defined by e 'x2 and by Fourier transform relation the pupil function A(w) is obtained and then the amplitude impulse U(x) is derived for a finite aperture. It is shown EG is < 1/2 radius of the Airy disk = 1/2 ER in the system of NA=0.25 and 2=130nm(Soft X-ray). Also, it is shown the OTF of the annular Gaussian aperture depends only on the outer diameter of the pupil, which is a special feature of the Gaussian pupil. , .

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781K (1 September 1996); doi: 10.1117/12.2298938
Show Author Affiliations
Young Ran Song, Inha Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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