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Proceedings Paper

Chalcogenide inorganic resists: properties and applications in holography, optoelectronics, microlithography
Author(s): A. V. Stronski
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Paper Abstract

Properties of chalcogenide inorganic resists and their applications in holography ( for the recording of holographic diffraction gratings, optical elements), microelectronics, optoelectronics are considered.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781A (1 September 1996); doi: 10.1117/12.2298928
Show Author Affiliations
A. V. Stronski, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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