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Proceedings Paper

Characterization of Ch-plasmas with CSR based microwave spectrometers
Author(s): F. Wolf
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Paper Abstract

In this paper the experimental analysis of plasmas suitable for thin film deposition using a highresolution mm-wave spectrometer is reported.

Paper Details

Date Published: 30 August 1993
PDF: 2 pages
Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210463 (30 August 1993); doi: 10.1117/12.2298651
Show Author Affiliations
F. Wolf, Analytik and Messtechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 2104:
18th International Conference on Infrared and Millimeter Waves
James R. Birch; Terence J. Parker, Editor(s)

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