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Proceedings Paper

Far-infrared ellipsometry of converged beam, theory and experiment
Author(s): A. B. Sushkov
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Paper Abstract

Ellipsometry is a well known technique of measurement of the optical constants of different substances. To determine the optical constants of small samples in FIR someone should focus irradiation on the sample surface by means of lens or mirror to avoid diffraction effects and to use all energy of the beam. So the problem of converged beam ellipsometry arises. This decision is valid in approximation of parabolic equation or Fresnel integral.

Paper Details

Date Published: 1 October 1991
PDF: 2 pages
Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15764A (1 October 1991); doi: 10.1117/12.2297867
Show Author Affiliations
A. B. Sushkov, Institute for Physical Problems (Russian Federation)


Published in SPIE Proceedings Vol. 1576:
16th International Conference on Infrared and Millimeter Waves
Minh Quang Tran, Editor(s)

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