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Proceedings Paper

New dynamic silicon photonic components enabled by MEMS technology
Author(s): Carlos Errando-Herranz; Pierre Edinger; Marco Colangelo; Joel Björk; Samy Ahmed; Göran Stemme; Frank Niklaus; Kristinn B. Gylfason
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Paper Abstract

Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

Paper Details

Date Published: 22 February 2018
PDF: 7 pages
Proc. SPIE 10537, Silicon Photonics XIII, 1053711 (22 February 2018); doi: 10.1117/12.2297588
Show Author Affiliations
Carlos Errando-Herranz, KTH Royal Institute of Technology (Sweden)
Pierre Edinger, KTH Royal Institute of Technology (Sweden)
Marco Colangelo, KTH Royal Institute of Technology (Sweden)
Joel Björk, KTH Royal Institute of Technology (Sweden)
Samy Ahmed, KTH Royal Institute of Technology (Sweden)
Göran Stemme, KTH Royal Institute of Technology (Sweden)
Frank Niklaus, KTH Royal Institute of Technology (Sweden)
Kristinn B. Gylfason, KTH Royal Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 10537:
Silicon Photonics XIII
Graham T. Reed; Andrew P. Knights, Editor(s)

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