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Improvement of nano-imprint lithography performance for device fabrication
Author(s): Takuya Kono; Masayuki Hatano; Hiroshi Tokue; Kei Kobayashi; Hirokazu Kato; Masato Suzuki; Kazuya Fukuhara; Tetsuro Nakasugi; Eun Hyuk Choi; Wooyung Jung
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Paper Abstract

A low cost alternative lithographic technology is desired to cope with the challenges in decreasing feature size of semiconductor devices. Nano-imprint lithography (NIL) is one of the viable candidates.[1][2][3] NIL has been a promising solution to overcome the cost issue associated with expensive process and tool of multi patterning and EUVL. NIL is a simple technology and is capable of forming critical patterns easily. On the other hand, the critical issues of NIL are defectivity, overlay, and throughput. In order to introduce NIL into the High Volume Manufacturing (HVM), it is necessary to overcome these three challenges simultaneously.[4]-[10] In our previous study, we have reported improvement in NIL overlay, defectivity and throughput by the optimization of resist process on a pilot line tool, FPA-1200 NZ2C. In this study, we report recent evaluation of the NIL performance to judge its applicability in semiconductor device HVM. We have described that the NIL is getting closer to the target of HVM for 2x nm half pitch.[8]Defectivity level below 1pcs/cm2 has been achieved for the 2x nm half pitch L/S. The overlay accuracy of the test device is being improved down to 6nm or lower by introducing high order distortion correction.

Paper Details

Date Published: 2 May 2018
PDF: 9 pages
Proc. SPIE 10584, Novel Patterning Technologies 2018, 105840V (2 May 2018); doi: 10.1117/12.2297294
Show Author Affiliations
Takuya Kono, Toshiba Memory Corp. (Japan)
Masayuki Hatano, Toshiba Memory Corp. (Japan)
Hiroshi Tokue, Toshiba Memory Corp. (Japan)
Kei Kobayashi, Toshiba Memory Corp. (Japan)
Hirokazu Kato, Toshiba Memory Corp. (Japan)
Masato Suzuki, Toshiba Memory Corp. (Japan)
Kazuya Fukuhara, Toshiba Memory Corp. (Japan)
Tetsuro Nakasugi, Toshiba Memory Corp. (Japan)
Eun Hyuk Choi, SK Hynix, Inc. (Korea, Republic of)
Wooyung Jung, SK Hynix, Inc. (Korea, Republic of)

Published in SPIE Proceedings Vol. 10584:
Novel Patterning Technologies 2018
Eric M. Panning, Editor(s)

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