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Proceedings Paper

A simulation study on bridge defects in lamellae-forming diblock copolymers
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Paper Abstract

In this paper we will describe a self-consistent field theory simulation study on bridge defects in lamellae-forming diblock copolymers. Because the bridge defects are buried three-dimensional defects formed in the diblock copolymer film, it is difficult to observe and determine what causes them. To determine the cause of the bridge defects effectively, self-consistent field theory simulations were used. By reproducing structural characteristics of the bridge defects in the simulation, the cause of the bridge defects were clarified. Finally, we discussed ways to prevent the bridge defects.

Paper Details

Date Published: 13 March 2018
PDF: 7 pages
Proc. SPIE 10586, Advances in Patterning Materials and Processes XXXV, 105860U (13 March 2018); doi: 10.1117/12.2297287
Show Author Affiliations
Hironobu Sato, EUVL Infrastructure Development Ctr., Inc. (Japan)
Katsuyoshi Kodera, EUVL Infrastructure Development Ctr., Inc. (Japan)
Yuriko Seino, EUVL Infrastructure Development Ctr., Inc. (Japan)
Yusuke Kasahara, EUVL Infrastructure Development Ctr., Inc. (Japan)
Ken Miyagi, EUVL Infrastructure Development Ctr., Inc. (Japan)
Masayuki Shiraishi, EUVL Infrastructure Development Ctr., Inc. (Japan)
Tsukasa Azuma, EUVL Infrastructure Development Ctr., Inc. (Japan)


Published in SPIE Proceedings Vol. 10586:
Advances in Patterning Materials and Processes XXXV
Christoph K. Hohle, Editor(s)

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