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Proceedings Paper

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources
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Paper Abstract

Using a tabletop coherent extreme ultraviolet source, we extend current nanoscale metrology capabilities with applications spanning from new models of nanoscale transport and materials, to nanoscale device fabrication. We measure the ultrafast dynamics of acoustic waves in materials; by analyzing the material’s response, we can extract elastic properties of films as thin as 11nm. We extend this capability to a spatially resolved imaging modality by using coherent diffractive imaging to image the acoustic waves in nanostructures as they propagate. This will allow for spatially resolved characterization of the elastic properties of non-isotropic materials.

Paper Details

Date Published: 13 March 2018
PDF: 4 pages
Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105850N (13 March 2018); doi: 10.1117/12.2297223
Show Author Affiliations
Robert Karl, JILA (United States)
Joshua Knobloch, JILA (United States)
Travis Frazer, JILA (United States)
Michael Tanksalvala, JILA (United States)
Christina Porter, JILA (United States)
Charles Bevis, JILA (United States)
Weilun Chao, Lawrence Berkeley National Lab. (United States)
Begoña Abad Mayor, JILA (United States)
Daniel Adams, JILA (United States)
Giulia F. Mancini, JILA (United States)
Jorge N. Hernandez-Charpak, JILA (United States)
Henry Kapteyn, JILA (United States)
Margaret Murnane, JILA (United States)

Published in SPIE Proceedings Vol. 10585:
Metrology, Inspection, and Process Control for Microlithography XXXII
Vladimir A. Ukraintsev, Editor(s)

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