Share Email Print
cover

Proceedings Paper

Gas permeable template derived from cellulose in ultraviolet nanoimprint
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Nanoimprint lithography is applied to manufacturing of cell culture dish and biosensor. The outgas released from the material often causes defects on patterns. Gas permeable templates were derived from cellulose for ultraviolet nanoimprint lithography process. The templates were made of thermoset cellulose of acrylic group and methacrylic group. The light transmission rate of the thermoset cellulose film and mechanical properties and pattern structure of the gas permeable template were measured. The template with acrylic group baked at 80 °C for 10 min. showed superior mechanical properties. This suggests the template had a large number of crosslinked points. After pattern transfer from quartz template, structures of the holes, the pillars, and the lines and spaces on the gas permeable template were observed.

Paper Details

Date Published: 19 March 2018
PDF: 6 pages
Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058416 (19 March 2018); doi: 10.1117/12.2297093
Show Author Affiliations
Shinya Nakajima, Toyama Prefectural Univ. (Japan)
Kento Mizui, Toyama Prefectural Univ. (Japan)
Makoto Hanabata, Toyama Prefectural Univ. (Japan)
Satoshi Takei, Toyama Prefectural Univ. (Japan)


Published in SPIE Proceedings Vol. 10584:
Novel Patterning Technologies 2018
Eric M. Panning, Editor(s)

© SPIE. Terms of Use
Back to Top