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Piezoelectric gas flow controller based on dual-bimorph actuators
Author(s): Cheng-Yin Huang; Yu-Hsiang Hsu; Chih-Kung Lee
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Paper Abstract

In this paper, we present our study on a piezoelectric gas controller based on dual-bimorph piezoelectric valve [1]. The bimorph structure was designed to be a one-dimensional plate to reduce the overall size of the piezoelectric actuator. A rod was placed at the center of a pair of piezoelectric bimorphs, and the piezoelectric valve was slightly compressed to create a pre-stressed condition. These two piezoelectric bimorphs were synchronized to push the cylinder valve to initiate valving process. The performances of this system were studied and evaluated, including frequency response, pressure drop, and flow rate. The piezoelectric actuator was fabricated by attaching two 5 mm wide, 50 mm length and 0.4mm thick bimorph PZT together. The poling direction of the two PZT layers was in opposite direction to create a serial bimorph. PMMA cylinder were created by using a CO2 laser cutter. The level of the valving movement was studied under a different driving voltage and operating frequency. Preliminary finding showed that a 0.103mm displacement at 1 Hz can be achieved and the developed piezoelectric valve can be used to control output pressure.

Paper Details

Date Published: 11 April 2018
PDF: 7 pages
Proc. SPIE 10595, Active and Passive Smart Structures and Integrated Systems XII, 105951F (11 April 2018); doi: 10.1117/12.2296768
Show Author Affiliations
Cheng-Yin Huang, National Taiwan Univ. (Taiwan)
Yu-Hsiang Hsu, National Taiwan Univ. (Taiwan)
Chih-Kung Lee, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 10595:
Active and Passive Smart Structures and Integrated Systems XII
Alper Erturk, Editor(s)

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