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Proceedings Paper • Open Access

Slit manufacturing and integration for the Sentinel-4 NIR and UV-VIS spectrometers
Author(s): Matthias Mohaupt; Uwe Zeitner; Gerd Harnisch

Paper Abstract

The sentinel–4 spectrometer´s slits are the key components of the ultraviolet–visible (UV–VIS) and the near infrared (NIR) channels for earth observation, with absolute slit width accuracy and variation required as < 0.1 ?m, respectively, and slit planarity < 0.4 ?m peak to valley (P-V). Adapted lithographic structuring techniques as developed for the dry- and wet etching of silicon-on-insulator (SOI) wafers combined with special integration devices for accurate alignment as well as precision optical polishing of the mounting planes of the slit holders together with spring elements can fulfil these requirements. Protected aluminum coating ensures a light tight optical density at wavelengths between 200 nm and 1200 nm, electrical grounding, and chemical protection.

Paper Details

Date Published: 25 September 2017
PDF: 7 pages
Proc. SPIE 10562, International Conference on Space Optics — ICSO 2016, 105624M (25 September 2017); doi: 10.1117/12.2296065
Show Author Affiliations
Matthias Mohaupt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Uwe Zeitner, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Gerd Harnisch, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 10562:
International Conference on Space Optics — ICSO 2016
Bruno Cugny; Nikos Karafolas; Zoran Sodnik, Editor(s)

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