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An automatic chip structure optical inspection system for electronic components
Author(s): Zhichao Song; Bindang Xue; Jiyuan Liang; Ke Wang; Junzhang Chen; Yunhe Liu
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Paper Abstract

An automatic chip structure inspection system based on machine vision is presented to ensure the reliability of electronic components. It consists of four major modules, including a metallographic microscope, a Gigabit Ethernet high-resolution camera, a control system and a high performance computer. An auto-focusing technique is presented to solve the problem that the chip surface is not on the same focusing surface under the high magnification of the microscope. A panoramic high-resolution image stitching algorithm is adopted to deal with the contradiction between resolution and field of view, caused by different sizes of electronic components. In addition, we establish a database to storage and callback appropriate parameters to ensure the consistency of chip images of electronic components with the same model. We use image change detection technology to realize the detection of chip images of electronic components. The system can achieve high-resolution imaging for chips of electronic components with various sizes, and clearly imaging for the surface of chip with different horizontal and standardized imaging for ones with the same model, and can recognize chip defects.

Paper Details

Date Published: 10 January 2018
PDF: 6 pages
Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 106161E (10 January 2018); doi: 10.1117/12.2295496
Show Author Affiliations
Zhichao Song, Beihang Univ. (China)
Bindang Xue, Beihang Univ. (China)
Jiyuan Liang, China Academy of Launch Vehicle Technology (China)
Ke Wang, China Academy of Launch Vehicle Technology (China)
Junzhang Chen, Beihang Univ. (China)
Yunhe Liu, Beihang Univ. (China)


Published in SPIE Proceedings Vol. 10616:
2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Baohua Jia; Kimio Tatsuno; Liquan Dong, Editor(s)

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