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Design of measurement system of 3D surface profile based on chromatic confocal technology
Author(s): An-su Wang; Bin Xie; Zi-wei Liu
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Paper Abstract

Chromatic confocal 3D profilometer has widely used in science investigation and industry fields recently for its high precision, great measuring range and numerical surface characteristic. It can provide exact and omnidirectional solution for manufacture and research by 3D non-contact surface analysis technique. The article analyzes the principle of surface measurement with chromatic confocal technology, and provides the designing indicators and requirements of the confocal system. As the key component, the dispersive objective used to achieve longitudinal focus vibration with wavelength was designed. The objective disperses the focus of wavelength between 400~700 nm to 15 mm longitudinal range. With selected spectrometer, the resolution of chromatic confocal 3D profilometer is no more than 5 μm, which can meet needs for the high precision non-contact surface profile measurement.

Paper Details

Date Published: 10 January 2018
PDF: 6 pages
Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 1061618 (10 January 2018); doi: 10.1117/12.2295170
Show Author Affiliations
An-su Wang, Soochow Univ. (China)
Bin Xie, Soochow Univ. (China)
Zi-wei Liu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 10616:
2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Baohua Jia; Kimio Tatsuno; Liquan Dong, Editor(s)

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